| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c2d1b17808513c2549c0ab26f24078d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 |
| filingDate |
2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8d745067bbe60ea0e6fe8791a218956 |
| publicationDate |
2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016182007-A1 |
| titleOfInvention |
Plate wave devices with wave confinement structures and fabrication methods |
| abstract |
A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11738539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10530329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10305443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10305442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018182950-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10326426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11362640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11588466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11539341-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10389332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018083181-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11218132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11750169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10938367-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10348269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11545955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200142469-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102451077-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109921759-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847707-B2 |
| priorityDate |
2014-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |