| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c2d1b17808513c2549c0ab26f24078d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 |
| filingDate |
2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f2995f05c1ed9746fbefb7ddfb0379 |
| publicationDate |
2019-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10389332-B2 |
| titleOfInvention |
Plate wave devices with wave confinement structures and fabrication methods |
| abstract |
A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020295729-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023053722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646714-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022123712-A1 |
| priorityDate |
2014-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |