Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-049 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66734 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7813 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28008 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
filingDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_337e5e3ca6f66d1917161bdaf4e1d3c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a5a086a96f70a911a4e7926d10a898d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dee71b217f7d178cac2515cc1b34779 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2812618f3b97bb4fdf230c45f03bf57e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d909e356a28d754fec1bb7160325ddbb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42a9f846938b5e2255a6eae63d41939 |
publicationDate |
2016-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2016172468-A1 |
titleOfInvention |
Method of forming a silicon-carbide device with a shielded gate |
abstract |
A silicon-carbide semiconductor substrate having a plurality of first doped regions being laterally spaced apart from one another and beneath a main surface, and a second doped region extending from the main surface to a third doped region that is above the first doped regions is formed. Fourth doped regions extending from the main surface to the first doped regions are formed. A gate trench having a bottom that is arranged over a portion of one of the first doped regions is formed. A high-temperature step is applied to the substrate so as to realign silicon-carbide atoms along sidewalls of the trench and form rounded corners in the gate trench. A surface layer that forms along the sidewalls of the gate trench during the high-temperature step from the substrate is removed. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016111998-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177354-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199466-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10083835-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108735817-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431465-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580878-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7257507-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10586851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022502863-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10374044-B2 |
priorityDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |