| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2015-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_768eda2a2562f2f735e00971b2d425b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea17ad9c4d290f279191aa15c97c5087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0aa7592f243382ca26e37e19eda520
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ce26b92aa1a74d4ec37df4e882360e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32740714f45889c006c653c2b81b8322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b369d78a4da0701f9329db7e5b1248a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48e3670c36aff59b52bf28b1aa4a961c |
| publicationDate |
2016-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016064280-A1 |
| titleOfInvention |
Method for forming three-dimensional interconnection, circuit arrangement comprising three-dimensional interconnection, and metal film-forming composition for three-dimensional interconnection |
| abstract |
In a method for forming a three-dimensional interconnection, a contact plug is formed within a through hole provided in a substrate and an upper wire formed on an upper side of the substrate and a lower wire formed on a lower side are electrically connected to one another by the contact plug. A coating film is formed on an upper surface of the substrate and inner surface of the through hole by applying a metal film-forming composition containing at least one salt of and a particle of a metal to the substrate provided with the through hole. A metal film is formed by heating the coating film, and plated by filling up the through hole by depositing a conductor on the metal film by a plating process using the metal film as a seed layer. An excess conductor deposited in the plating is removed by a chemical mechanical polishing process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10319668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11033082-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626348-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10809666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832988-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10332870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062995-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023079160-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019267366-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11425973-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930595-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019096809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018240760-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10916535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016071791-A1 |
| priorityDate |
2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |