http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016017181-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
filingDate 2013-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822fba8f022bf5b848b847710aeb3924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4990571e55ab6ed19f29d66cb4f1a4ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5a99a7c144933a7bf770350b2e6bb62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a0add023a7ae6b7a24f9cee414f510c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2f55e4c8fbd11ad5c2b06a8cb4dc7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e83e6ff7ab38e9a149dbce4fe0f401fe
publicationDate 2016-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016017181-A1
titleOfInvention Cmp slurry composition for polishing copper, and polishing method using same
abstract The present invention relates to a CMP slurry composition for polishing copper, comprising: polishing particles; a complexing agent; a corrosion inhibitor; and deionized water. The complexing agent comprises one or more organic acids selected from oxalic acid, malic acid, malonic acid, and formic acid, and glycine.
priorityDate 2012-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012024818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009289217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009298289-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009246956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004229461-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7183211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011300778-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013020283-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010184291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010087065-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007293047-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009215269-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407698410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450864287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426207645
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9257
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411738766
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID750
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227167701
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407631466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450313723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524207
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406908050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13827790
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID867
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524198

Total number of triples: 76.