| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6af9a57049d2d91c036d4f5ab49154cb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00 |
| filingDate |
2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_135dd4c9569f251c3197f0c9bd4d3b75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e658e2dc1c29bd841ca66af9ae2d0b84 |
| publicationDate |
2015-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015371956-A1 |
| titleOfInvention |
Crackstops for bulk semiconductor wafers |
| abstract |
Embodiments of the present invention provide crackstops for bulk semiconductor wafers and methods of fabrication. A die level crackstop is formed as a trench within the wafer around each die. A wafer level crackstop includes one or more trenches formed as rings around the periphery of the wafer near the wafer edge. These crackstops serve to prevent damage during handling of ultra thin wafers and dicing of individual ICs, thereby improving product yield. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4156260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10712266-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10396042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3866190-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964647-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019285544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021165801-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021407901-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110828296-A |
| priorityDate |
2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |