http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187589-A1

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publicationDate 2015-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015187589-A1
titleOfInvention Hardmask composition and method of forming patterns using the hardmask composition
abstract A hardmask composition includes a polymer including a moiety represented by the following Chemical Formula 1 and a solvent. n n n n n n n n n n In the above Chemical Formula 1, A and B are as defined in the specification.
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