| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2014-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa62803341ede83a6eb4723fe244c211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e176054885778511e565c7c291d282b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c73dc64e5abecaeb33d3d9612daebdd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adae09020eb471fbf0749c1e31ca4582 |
| publicationDate |
2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015137285-A1 |
| titleOfInvention |
Capacitive micromachined ultrasonic transducer and method of fabricating the same |
| abstract |
A capacitive micromachined ultrasonic transducer and a method of fabricating the same are provided. The capacitive micromachined ultrasonic transducer includes a device substrate including a first trench defining a plurality of first portions corresponding to an element and a second trench spaced apart from the first trench; a supporting unit provided on the device substrate, the supporting unit defining a plurality of cavities; a membrane provided on the supporting unit to cover the plurality of cavities; a top electrode electrically connected to a second portion in the second trench through a via hole penetrating through the membrane and the supporting unit; and a through silicon via (TSV) substrate provided on a bottom surface of the device substrate, the TSV substrate including a first via metal connected to the plurality of first portions corresponding to the element and a second via metal connected to the second portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10512936-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10228353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10766768-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11559827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10175206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10967400-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109414727-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11706987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10525506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019522449-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10524059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11672179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017168025-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2017281280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10782269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3054719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10247708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017222969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021193906-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7026111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113857023-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10335827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I721183-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107369756-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018236956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023017034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10562069-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3471897-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450190-B2 |
| priorityDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |