| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3344 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32908
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d019fc909b4031d9deb1275ccf019bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6897b78fdd066ec236961f0042b00439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3ad19474b95e07a88f2776aee05a580
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b4ccd24ad666c4a3d3c26f351768e7a |
| publicationDate |
2015-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015091441-A1 |
| titleOfInvention |
Control of Impedance of RF Delivery Path |
| abstract |
A plasma system includes an RF generator and a matchbox including an impedance matching circuit, which is coupled to the RF generator via an RF cable. The plasma system includes a chuck and a plasma reactor coupled to the matchbox via an RF line. The RF line forms a portion of an RF supply path, which extends between the RF generator through the matchbox, and to the chuck. The plasma system further includes a phase adjusting circuit coupled to the RF supply path between the impedance matching circuit and the chuck. The phase adjusting circuit has an end coupled to the RF supply path and another end that is grounded. The plasma system includes a controller coupled to the phase adjusting circuit. The controller is used for changing a parameter of the phase adjusting circuit to control an impedance of the RF supply path based on a tune recipe. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361941-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016307738-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10952289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11632829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10249476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11570857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112538619-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I768273-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11382190-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016233058-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10917948-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022108754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11039511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11039512-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10917065-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11166352-B2 |
| priorityDate |
2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |