| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a92ab29dd77c3f28f47652ba09e565b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89024707ac582296a48232f8196f3628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2b6ada098c577a21c1e29c7663d9007 |
| publicationDate |
2015-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015056816-A1 |
| titleOfInvention |
Semiconductor device manufacturing method and computer-readable storage medium |
| abstract |
A semiconductor device manufacturing method for etching a substrate having a multilayer film formed by alternately stacking a first film and a second film, and a photoresist layer to form a step-shaped structure is provided. The step-shaped structure is formed by repeatedly performing a first step of plasma-etching the first film by using the photoresist layer as a mask, a second step of exposing the photoresist layer formed on the substrate to a plasma generated from a processing gas containing argon gas and hydrogen gas by applying a high frequency power to a lower electrode while applying a negative DC voltage to an upper electrode, a third step of trimming the photoresist layer, and a fourth step of plasma-etching the second film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704878-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10153295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10682805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10879595-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019333777-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018021-B2 |
| priorityDate |
2012-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |