| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2014-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f92eca2784174f96a1194f1aedb66c8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d0b7c9db8db4ac0f016c2eaee593779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f755c300b2571521cc9151a64d85c60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e4ec52d66c07dc6d80e8be27740ac48 |
| publicationDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014363770-A1 |
| titleOfInvention |
Negative tone resist composition for solvent developing and method of forming resist pattern |
| abstract |
A negative tone resist composition for solvent developing including: a base component (A) which exhibits decreased solubility in an organic solvent under the action of acid; a photodecomposable quencher (D0) which generates acid having a pKa of 2.0 or more; and a fluorine additive (F) containing a fluorine-containing polymeric compound (f) which has a structural unit (f0-1) represented by general formula (f0-1) shown below or a structural unit (f0-2) represented by general formula (f0-2) shown below. In the formulae, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; and R f 1 represents an aliphatic hydrocarbon group containing a fluorine atom. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021026243-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9791777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016274458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016347897-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9678423-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021200087-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11703756-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021200088-A1 |
| priorityDate |
2013-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |