| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af99df08b153738cd418446a75d09bfc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C269-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C271-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e26f2be9b8de1c83ebdd014359f0ad5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_134ddfe636bb72206770359c78fd8edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da4dbaa51b3c21eb739c5cee3a2f5720 |
| publicationDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014356785-A1 |
| titleOfInvention |
Photoresists comprising carbamate component |
| abstract |
New photoresist compositions are provided that comprise a carbamate compound that comprises 1) a carbamate group and 2) an ester group. Preferred photoresists of the invention may comprise a resin with acid-labile groups; an acid generator compound; and a carbamate compound that can function to decrease undesired photogenerated-acid diffusion out of unexposed regions of a photoresist coating layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3746440-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10274824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017176282-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315798-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10474032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9256125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345659-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019152527-A1 |
| priorityDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |