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publicationDate 2014-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014306344-A1
titleOfInvention Wiring structure, semiconductor device including wiring structure, and method of manufacturing semiconductor device
abstract There is provided with a wiring structure. The wiring stracture has a damascene wiring structure including a metal wiring. The metal wiring is provided in direct contact with an upper surface of a barrier film (SiC(O, N) film) containing silicon (Si), carbon (C), and at least one of oxygen (O) and nitrogen (N) as constituent components.
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