| abstract |
A trialkylsilane-based silicon precursor compound may be expressed by the following chemical formula 1. n n n n n n n n n n In the chemical formula 1, each of “R 1 ”, “R 2 ”, and “R 3 ” is a hydrogen or an alkyl having 1˜5 carbon(s), all of “R 1 ”, “R 2 ”, and “R 3 ” are not hydrogen, “X” is one of hydrogen, a hydroxyl group, an amide group, an alkoxide group, a halide group, or Si(R*) 3 , and “R*” is a hydrogen or an alkyl group having 1˜5 carbon(s). |