| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_083da14eddcdea49500a769dcdf47b6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-548 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-03921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02366 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-076 |
| filingDate |
2013-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14879302ec26f77f0c212f185b76ca81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_149d5c0c35a7fdf65cd83170a3b5c01d |
| publicationDate |
2013-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013337603-A1 |
| titleOfInvention |
Method for hydrogen plasma treatment of a transparent conductive oxide (tco) layer |
| abstract |
A method for fabricating a thin film solar device that includes providing a substrate having a transparent conductive oxide (TCO) layer deposited on a surface of the substrate, the TCO layer having an as deposited sheet resistance. At least a portion of a surface of the TCO layer is exposed to a hydrogen plasma under conditions which result in a treated TCO layer having a reduced sheet resistance which is at least 10% less than the as deposited sheet resistance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10788723-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11599003-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112531045-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020251672-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10288969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018190844-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11559852-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11561446-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10969645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11668990-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11054711-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10162240-B2 |
| priorityDate |
2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |