| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6638ac6b1020cd2c62d09d748bc1ab9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98ec0629c8a506ce664ac51ffe289487 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2105-0061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0827 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-38
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-4266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-10
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1809
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1847 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18 |
| filingDate |
2013-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f94bc4854e34595860d60217a96cb1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab9981f8321b02de11b54a1e29f2ab71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bfd0ca933b37efab0afd7b5fde90902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6bdb5490b6d4bb4a85277567bbbd94e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36934530d0ef13bd6878665210c66239 |
| publicationDate |
2013-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013299796-A1 |
| titleOfInvention |
Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic el element including the diffraction grating |
| abstract |
A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115900404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10321159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017229622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015050816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11307328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103357-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11112540-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842962-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9310319-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018050904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9660217-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11789189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012298953-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10183441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015362635-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11567371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11733443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10035473-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10981304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9511552-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859512-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018224578-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10946344-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9954152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016251250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9203054-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10357917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016300981-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9851579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714360-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11789182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9995944-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490679-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9688215-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2884314-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016144261-A1 |
| priorityDate |
2011-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |