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publicationDate 2013-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013256890-A1
titleOfInvention Shallow via formation by oxidation
abstract A method, and an apparatus formed thereby, to construct shallow recessed wells on top of exposed conductive vias on the surface of a semiconductor. The shallow recessed wells are subsequently filled with a conductive cap layer, such as a tantalum nitride (TaN) layer, to prevent or reduce oxidation which may otherwise occur naturally when exposed to air, or possibly occur during an under-bump metallization process.
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