| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a39328e35fb55c8b4993fabacd0bd72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1290e01944ea7b5aef455523d0e9cda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10377a8a1e4c5be9dd7508adeb577535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7787dbbb2f3df20d80836f97b1832acf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a1c3081dbf4c33fbcae6897720d5bbeb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e13f060cd3b22e198b24fab750e5fad8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab5edea111ebacd795cf6b844724d836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff309009ceb31334baf09b12735f3ac0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e25518edfdb0f5cb15ccaa1c60093845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e30ad29cb2a440ddcb29765275ac15b |
| publicationDate |
2013-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013252407-A1 |
| titleOfInvention |
Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers |
| abstract |
Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae Si n H 2n and Si n H 2n+2 as well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450419-B2 |
| priorityDate |
2006-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |