| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 |
| filingDate |
2013-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a65fbc21606a14379f15a87aa4140dc6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45f74c73a317f3a5f98bea3c48e114a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_573c2232c2120b2dbf5fdabf89125321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27522478002d7eaf4ebafe7fc2d0f8a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6776ad211f4a9a0268cad78a580a66a8 |
| publicationDate |
2013-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013228871-A1 |
| titleOfInvention |
Plasma doping to reduce dielectric loss during removal of dummy layers in a gate structure |
| abstract |
A semiconductor device which includes a first gate structure on a substrate and a second gate structure on the substrate is provided. The semiconductor device further includes an inter-level dielectric (ILD) layer on the substrate between the first gate structure and the second gate structure, wherein a top portion of the ILD layer has a different etch selectivity than a bottom portion of the ILD layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11271087-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018090590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9530696-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9773887-B2 |
| priorityDate |
2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |