| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3588ff720c2d7ce273b4a8d326f8a0a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e22b6afe2664d89ffa99a02244dcffed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2011-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c88fd55329e0040cf33245918c9d89b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a87853c69b8b47a6ba840cef06ba2480 |
| publicationDate |
2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013183826-A1 |
| titleOfInvention |
Composition for polishing and composition for rinsing |
| abstract |
A polishing composition for a silicon wafer and a rinsing composition for a silicon wafer according to the present invention contain a nonionic surfactant of a polyoxyethylene adduct. The HLB value of the polyoxyethylene adduct is 8 to 15. The weight-average molecular weight of the polyoxyethylene adduct is 1400 or less. The average number of moles of oxyethylene added in the polyoxyethylene adduct is 13 or less. The content of the polyoxyethylene adduct in each of the polishing composition and the rinsing composition is 0.00001 to 0.1% by mass. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10144907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11306248-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017150118-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019249122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110402478-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522341-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11028340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110383426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10179870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016089660-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11332640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10865368-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11384257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017243752-A1 |
| priorityDate |
2010-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |