| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d15f4011d8f9e7685df01c0b08cf6678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5351c62aee4203f2be2944f21a6def2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_989273fb5b507eb4f19fe5314e13c30c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30419a9c139e14d79cfa0b397ffcbad1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d75cf278fe3fe992b33c063ee890eff9 |
| publicationDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013161620-A1 |
| titleOfInvention |
Composition for an oxide thin film, a preparation method of the composition, a method for forming an oxide thin film using the composition, an electronic device including the oxide thin film, and a semiconductor device including the oxide thin film |
| abstract |
Provided are a composition for an oxide thin film, a preparation method of the composition, a method for forming an oxide thin film using the composition, an electronic device including the oxide thin film, and a semiconductor device including the oxide thin film. The composition for the oxide thin film includes a metal precursor and nitric acid-based stabilizer. The metal precursor includes at least one of a metal nitrate, a metal nitride, and hydrates thereof. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111180309-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015275017-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022213608-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013237011-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9969896-B2 |
| priorityDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |