http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013115780-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
filingDate 2012-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e4d3c030bf1fedcbd12acacd91b55a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb11e90038f713476238c643434f83e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b03f0dc39d0b9033e340d3c3f49b0f0
publicationDate 2013-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013115780-A1
titleOfInvention Plasma processing apparatus and plasma processing method
abstract A plasma processing apparatus has a circular chamber having an opening portion which serves as a plasma ejection port surrounded by a dielectric member, a gas supply pipe for introducing gas into the inside of the chamber, a coil provided in the vicinity of the chamber, a high-frequency power supply connected to the coil, and a base material mounting table.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021254217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583313-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10141162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018174800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10995406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11701225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9673062-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111389196-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012145671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847358-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10685815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9601330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013105460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015118867-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11773491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10991548-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10676825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11007497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9691593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017275758-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9595458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9209043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9978593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022406564-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10181406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115565-B2
priorityDate 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-H566-H
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5146137-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004182517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008023070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001008229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4266113-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4482246-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123

Total number of triples: 60.