http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013101940-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-202 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbd3af388e09409f54cde52e63e0d86a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e4d26736c459da81219f8b93ba305e5 |
| publicationDate | 2013-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2013101940-A1 |
| titleOfInvention | Chemical amplified photoresist composition |
| abstract | A chemical amplified photoresist composition containing a resin, an acid generator, and a compound of formula (X): n n n n n n n n n n wherein R 1a , R 2a , R 3a , R 6a , R 7a and R 8a each independently represent a hydrogen atom, a hydroxyl group, a carboxy group, —SO 3 , —NH 2 , a halogen atom, a mercapto group, a C1-C12 alkyl group optionally having a substituent, a C6-C30 aryl group optionally having a substituent, a C3-C12 cycloalkyl group optionally having a substituent, and R 4a and R 5a each independently represent a hydrogen atom, a hydroxyl group, a carboxy group, —SO 3 , —NH 2 , a halogen atom, a mercapto group, a C1-C12 alkyl group optionally having a substituent, a C6-C30 aryl group optionally having a substituent, or a C3-C12 cycloalkyl group optionally having a substituent, or R 4a and R 5a are bonded each other to form a ring together with carbon atoms binding R 4a and R 5a and with the carbon atoms forming the bond between the pyridine rings. |
| priorityDate | 2011-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 699.