| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e13bd2d476d53df53aa23a34d06fa01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5361248d3cc584199edc0857256da5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9959b1f3e171746fe1fb64bb66a8c93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99a878799de053d0fee4769eb5a58285 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba185a274a9485007252e915b6fbce5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ef5f458041d7887c6a93f1edaa13190
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d1daeb16db164ddaa69c1d3c4c66930 |
| publicationDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013037912-A1 |
| titleOfInvention |
Method for fabricating a damascene self-aligned ferroelectric random access memory (f-ram) with simultaneous formation of sidewall ferroelectric capacitors |
| abstract |
Disclosed is a non-volatile, ferroelectric random access memory (F-RAM) device and a method for fabricating the same in the form of a damascene self-aligned F-RAM device comprising a PZT capacitor built on the sidewalls of an oxide trench, while allowing for the simultaneous formation of two ferroelectric sidewall capacitors. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475798-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741563-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021375552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3321983-A1 |
| priorityDate |
2011-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |