| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2af35ea2547cca82d909be6ec2b9c3c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e548f9ea5a33ea341372a264b2b3713
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_015b6bf758999a4b37ca481543d6ef56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D493-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F228-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D487-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2012-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4851a9cd4039ea49eb65b9339600ddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5062af3d8ec11501285632a566192dcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ea50f8269c01131356bb052caf7a237 |
| publicationDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012308920-A1 |
| titleOfInvention |
Sulfonium salt, polymer, chemically amplified resist composition using said polymer, and resist patterning process |
| abstract |
There is disclosed a sulfonium salt shown by the following general formula (1). There can be a sulfonium salt capable of introducing an acid-generating unit generating an acid having an appropriate acid strength and not impairing adhesion with a substrate into a base polymer; a polymer using the said sulfonium salt; a chemically amplified resist composition using the said polymer as a base polymer; and a patterning process using the said chemically amplified resist composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011189607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9285678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10345700-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9499513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014080058-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015168829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11500285-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012308932-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8945814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9535325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8691490-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11131926-B2 |
| priorityDate |
2011-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |