Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2220-382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-14 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
2014-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0305c2aeccabb3114c7ffb521d36f79b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67115ab4bc8056829498736e680c43d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6efbdd106e53689a924e0c0910d0d6bc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f07865b966413dbccad5ac591495078 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6796042c37f6876c814234951c34b1a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_292632a49431fad087b36295c8c22fa0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a82747c1e7fefe273bcaa608af9ed5a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb016b791b358f28a52261ace697b344 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bfdc17d8408d0e9baaaea09aa24622b |
publicationDate |
2019-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10345700-B2 |
titleOfInvention |
Negative-tone resist compositions and multifunctional polymers therein |
abstract |
A negative-tone resist composition is provided that contains a free photoacid generator and a multifunctional polymer covalently bound to a photoacid-generating moiety, where the composition is substantially free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist composition are also provided, as is a process for generating a resist image on a substrate using the present compositions and polymers. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11500285-B2 |
priorityDate |
2014-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |