patent/US-2012304483-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012304483-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df6241fc10e76e9c1948b4f191b270eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e589ca0aea7628b9473199cd555b76c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d9eae7d31369d0183d31975e0a67c5
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B5-06
filingDate	2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c7ef2a32b0ed543197aa31ac2419b20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_832e8e62873d82c7daba57468339bdf9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f32ba3434bd26a91a050e173726f635b
publicationDate	2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2012304483-A1
titleOfInvention	Substrate freeze dry apparatus and method
abstract	An apparatus for freeze drying a substrate is provided. A chamber for receiving a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is within the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is in fluid connection with the chamber.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10908518-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022181171-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I631611-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016071747-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482409-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013153147-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10069443-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10690413-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014101964-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9513053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10651643-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I668757-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019189427-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10921057-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9683780-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109427624-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9488565-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9488564-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10001713-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017075554-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9746241-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8769841-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10876792-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013118025-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015034659-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11713924-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9816757-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8898928-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8991067-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022060563-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10760852-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10240867-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9970708-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600850-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11302525-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347835-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I759725-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015370180-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094565-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014153007-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957530-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10928135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9644891-B2
priorityDate	2011-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate

Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6337277-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002132184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4917123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007023790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002050573-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006137212-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008286978-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010081274-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004261946-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128155917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12021

Total number of triples: 76.