| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ce40954ebbaae05d459801eea38eb441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93bbcb11bbb9a36f3ee31bf80f9df30f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_902a854567f25e868c58e60218646a55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9794dc2ada4810ad77b71617d26f59ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4fca56ecc64e9491699a0d1bb5e5d33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fec08a707eb4bd47a39f135bb822434 |
| publicationDate |
2012-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012222817-A1 |
| titleOfInvention |
Plasma processing apparatus |
| abstract |
A plasma processing apparatus includes: a first ground member provided in processing chamber in such a way that at least a portion of the first ground member is exposed to a processing space, wherein the first ground member forms a ground potential; a second ground member provided in an exhaust space of the processing chamber to face the first ground member in such a way that at least a portion of the second ground member is exposed to the exhaust space, wherein the second ground member forms a ground potential; and a ground rod that moves up and down between the first and second ground members and contacts any one of the first or second ground member to adjust a ground state of the first or second ground member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10217613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102585287-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022076929-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113972124-A |
| priorityDate |
2011-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |