http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012202337-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1025c09917215222e1454d4afa6b0f55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33a93ade8373871f310afd170e6a2fce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93778798c8a0eec493a8fd7eab9f8c16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccc00c91d3073ef75de27f0c69edd729
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2301-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2433-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31551
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-38
filingDate 2011-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11a4470eb0d50c4566c222f8a303531b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf3cfca59e0eb107b82a39c148151265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5afb73af78e45a520e27f1eae00e37fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_846f60a0142e633602eb75e26ee98d85
publicationDate 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012202337-A1
titleOfInvention Wafer processing sheet
abstract Provided is a sheet for processing a wafer. The sheet can exhibit excellent heat resistance and dimensional stability, prevent breakage of a wafer in response to residual stress due to excellent stress relaxation properties, inhibit damage to or dispersion of the wafer due to application of a non-uniform pressure, and also exhibit excellent cuttability. The sheet can effectively prevent a blocking phenomenon from occurring during wafer processing. For these reasons, the sheet can be useful for processing a wafer in various wafer preparation processes such as dicing, back-grinding and picking-up.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015111032-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10550296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014044959-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9765232-B2
priorityDate 2009-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7534498-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011139347-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6436795-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008131634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017323-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4301239-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10219877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID957
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128834532
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9859302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129302252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129755831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127442524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128960915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57298574
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53711727
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70355
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12726607
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129934631
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18172876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54246311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128590527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128339570
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22218760
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129336621
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57079064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127598341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75227
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127998792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID241793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127599056
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID35409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129301775
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129106216
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7282
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128212168
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128193010
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20208927
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128303982
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129067155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128930984
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15522
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128530678
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136282029
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66630700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID244068532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127542722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128363546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129073046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129478144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129048715
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128159137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135903892
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53966121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53962206
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127558039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128996645
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128823093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21891976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18628414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127751984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129182365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128567902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128468379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13878871
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID544160
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17151
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128293173
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129397925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128471131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129001639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128509552
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5247113

Total number of triples: 124.