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publicationDate 2012-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012189782-A1
titleOfInvention ELECTRONIC DEVICE MANUFACTURE USING LOW-k DIELECTRIC MATERIALS
abstract Materials and methods for manufacturing electronic devices and semiconductor components using low dielectric materials comprising polyimide based aerogels are described. Additional methods for manipulating the properties of the dielectric materials and affecting the overall dielectric property of the system are also provided.
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