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filingDate 2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38b93f70956dbdfc529f4b7c40bcce0c
publicationDate 2012-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012129106-A1
titleOfInvention Positive lift-off resist composition and patterning process
abstract A positive lift-off resist composition is provided comprising (A) an alkali-soluble novolac resin, (B) a quinonediazidosulfonate photosensitive agent, (C) an alkali-soluble cellulose resin, and (D) an aromatic hydroxy compound having a formula weight of 180-800. The composition has shelf stability, high sensitivity, and a film retention after development of at least 95% and is used to form a lift-off resist pattern of fully undercut profile.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016274459-A1
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priorityDate 2010-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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