http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011195578-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb11c8dcf8ef9b6c8b9b8a3f73668310 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f25549add08d005f75ba2781a88bee5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba8b07ee3b5ef84e515cbb1398d56e0b |
| publicationDate | 2011-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2011195578-A1 |
| titleOfInvention | Planar cell on cut using in-situ polymer deposition and etch |
| abstract | A method and manufacture for charge storage layer separation is provided. A layer, such as a polymer layer, is deposited on top of an ONO layer so that the polymer layer is planarized, or approximately planarized. The ONO includes at least a first region and a second region, where the first region is higher than the second region. For example, the first region may be the portion of the ONO that is over the source/drain region, and the second region may be the portion of the ONO that is over the shallow trench. Etching is performed on the polymer layer to expose the first region of the ONO layer, leaving the second region of the ONO unexposed. The etching continues to occur to etch the exposed ONO at the first region so that the ONO layer is etched away in the first region and the second region remains unexposed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8975185-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014081926-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014081928-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107978604-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014148009-A1 |
| priorityDate | 2010-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.