http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011117738-A1

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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d254951907588dcb29ff3aceaef55fb
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publicationDate 2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011117738-A1
titleOfInvention Method to alter silicide properties using gcib treatment
abstract A method of manufacturing a semiconductor device is described. The method comprises performing a gas cluster ion beam (GCIB) pre-treatment and/or post-treatment of at least a portion of a silicon-containing substrate during formation of a silicide region.
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