| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00e11e3bc0123d9bbf463ff0022bff03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de6d6913189711823dfcb4ae9871e6b9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
| filingDate |
2009-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fe8da0501d3bd557340040f3605bf96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7b3f9df53df4923f67970498248e720 |
| publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011117311-A1 |
| titleOfInvention |
Etching piezoelectric material |
| abstract |
Piezoelectric material is shaped by plasma etching to form deep features with high aspect ratios, and desired geometries. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015074174-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9457567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016248001-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9559292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664232-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3843126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015130044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015283812-A1 |
| priorityDate |
2008-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |