| abstract |
Coating compositions include a polymer including: n n n n n n n n n n wherein R 1 is a silicon containing moiety, R 2 is an acid stable lactone functionality, and R 3 is an acid labile lactone functionality; X 1 , X 2 , X 3 are independently H or CH 3 ; and m and o are non-zero positive integers and n is zero or a positive integer representing the number of repeat units; a photoacid generator; and a solvent. Also disclosed are methods for forming a pattern in the coating composition containing the same. |