| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0ed780cd77fd903ff9c2290876c8c7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2010-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_275c395bdfecf092fa29810266af9daf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9120596bc8860d19cf0128067d99d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1821baa603650f8afb7f5fb68df958b2 |
| publicationDate |
2011-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011056515-A1 |
| titleOfInvention |
Nf3 chamber clean additive |
| abstract |
Methods of cleaning a processing chamber with nitrogen trifluoride (NF 3 ) are described. The methods involve a concurrent introduction of nitrogen trifluoride and a reactive diluent into the chamber. The NF 3 may be excited in a plasma inside the chamber or in a remote plasma region upstream from the chamber. The reactive diluent may be introduced upstream or downstream of the remote plasma such that both NF 3 and the reactive diluent (and any plasma-generated effluents) are present in the chamber during cleaning. The presence of the reactive diluent enhances the chamber-cleaning effectiveness of the NF 3 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111446167-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011059617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015218695-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112840039-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014039425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10240230-B2 |
| priorityDate |
2009-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |