| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48a83c5dddf8d0d630877393ab391afe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8700fc72e59d410b66cc0665462d50a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f7436824cb6abcbb3b3d6a52c3191325 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2110-0066 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-7621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-00 |
| filingDate |
2009-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbc1ea32f335340f0bc47a3080334fb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a609574fd63f41d825f605a4c4887b7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16de31b1beeb78c097c42d7aac12a6d6 |
| publicationDate |
2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011034578-A1 |
| titleOfInvention |
Polyurethane composition for cmp pads and method of manufacturing same |
| abstract |
Polyurethane composition based on a certain polyether and polyester prepolymer reaction mixture, wherein the composition is utilized in manufacturing chemical mechanical polishing/planarizing (CMP) pads. The CMP pads have low rebound and can dissipate irregular energy as well as stabilize polishing to yield improved uniformity and less dishing of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9144880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016040050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9484212-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9458280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10086494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9238296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9238295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9233451-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014364578-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104209853-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104209854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396081-B2 |
| priorityDate |
2009-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |