| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0751
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee565e0921f3f7c3d4efebf21724b53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a04cd21914179b2d61be9e328012cc1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3676b2153c03c5f0526eb572f3e72318 |
| publicationDate |
2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010255427-A1 |
| titleOfInvention |
Conformal photo-sensitive layer and process |
| abstract |
The present disclosure provides a method for etching a substrate. The method includes forming a patterned photo-sensitive layer on the substrate; applying an etching chemical fluid to the substrate, wherein the patterned photo-sensitive layer includes an adhesion promoter and/or hydrophobic additive; removing the etching chemical fluid; and removing the resist pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016066069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10114288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10866362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017097240-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10007184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019293868-A1 |
| priorityDate |
2009-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |