| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 |
| filingDate |
2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e69a788219412d5d24de635f0d6131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e013a9eed35833d1cd1accc769d86fc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e835ceba29ff5d76ca2fce0449b29821 |
| publicationDate |
2010-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010216309-A1 |
| titleOfInvention |
Cmp polishing liquid and method for polishing substrate using the same |
| abstract |
Disclosed is a CMP polishing liquid for polishing a substrate having a layer containing ruthenium, comprising: an oxidizing agent; polishing particles; water; and a compound having a structure represented by the following Formula (1), or a salt thereof. This CMP liquid is improved in at least the polishing rate to a ruthenium layer when compared with conventional polishing liquid. Also disclosed is a method for polishing a substrate using such a CMP polishing liquid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8491806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2888758-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11111435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103930976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11267987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2779216-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010159698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8506831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012045970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8684793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171832-A1 |
| priorityDate |
2007-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |