| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfb0351bed4dc51d813bd013ebed52bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4616b9be177eb6fd521aacb464356972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_05588ab544563467eb24e31af1f26435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d7e29d377ca71855697e48ae6d0d53e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02087 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2009-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94d46c9e44b173dbd67e2f346cbee1cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49ab6c23a18f75169bc2ff91b821daec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69cff70613d0914a44f34db1aa27c330
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1c6a916857c83286920f8ca9a5be8d6 |
| publicationDate |
2010-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010099265-A1 |
| titleOfInvention |
Methods for removing an edge polymer from a substrate |
| abstract |
A method for generating plasma for removing an edge polymer from a substrate is provided. The method includes providing a powered electrode assembly, which includes a powered electrode, a dielectric layer, and a wire mesh disposed between the powered electrode and the dielectric layer. The method also includes providing a grounded electrode assembly disposed opposite the powered electrode assembly to form a cavity wherein the plasma is generated. The wire mesh is shielded from the plasma by the dielectric layer when the plasma is present in the cavity, which has an outlet at one end for providing the plasma to remove the edge polymer. The method further includes introducing at least one inert gas and at least one process gas into the cavity. The method yet also includes applying an RF field to the cavity using the powered electrode to generate the plasma from the inert gas and process gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147350-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8183500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8410394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012247670-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9214364-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8658937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147352-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011139757-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011139759-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415587-B2 |
| priorityDate |
2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |