| abstract |
A chemical mechanical polishing aqueous dispersion is used to polish a polishing target that includes an interconnect layer that contains tungsten. The chemical mechanical polishing aqueous dispersion includes: (A) a cationic water-soluble polymer; (B) an iron (III) compound; and (C) colloidal silica particles. The content (M A ) (mass %) of the cationic water-soluble polymer (A) and the content (M B ) (mass %) of the iron (III) compound (B) satisfy the relationship “M A /M B =0.004 to 0.1”. The chemical mechanical polishing aqueous dispersion has a pH of 1 to 3. |