| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5fc162e42103f617ecf315cc152dc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_609e59814ed2e6354d6e6a89319f0bbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_188a524a47167b80bc90994e7ebbc8f6 |
| publicationDate |
2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010041240-A1 |
| titleOfInvention |
Focus ring, plasma processing apparatus and plasma processing method |
| abstract |
A focus ring of a ring shape is disposed to surround a target substrate on a lower electrode on which the target substrate is mounted in a process chamber. The process chamber receives the target substrate and subjects the received target substrate to a plasma process. At the point of time when the focus ring is first used for the plasma process, a distance between a lower side of an edge portion of the target substrate and a portion of the focus ring facing the lower side of the edge portion of the target substrate is set to be equal to or greater than about 0.4 mm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755902-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022013338-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110546733-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110546733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015170925-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105990084-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016351378-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002744-B2 |
| priorityDate |
2008-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |