http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010032760-A1

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publicationDate 2010-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010032760-A1
titleOfInvention Thin-film transistor substrate and method of fabricating the same
abstract The present invention provides a thin-film transistor (TFT) substrate, which can be fabricated simply and at reduced cost, and a method of fabricating the TFT substrate. The TFT substrate includes: an insulating substrate; gate wiring that extends on the insulating substrate in a first direction; data wiring that extends on the gate wiring in a second direction, and includes a lower layer and an upper layer; and a semiconductor pattern that is disposed under the data wiring and has substantially the same shape as the data wiring except for a channel region, wherein root-mean-square roughness of a top surface of the data wiring is 3 nm or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546800-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910232-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011220891-A1
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priorityDate 2008-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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