| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2cc9d8bdc9f91094f087771dc5061631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3aa1996e2a9f948317a65ef08f5891f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc026bb6150f6e083fe0bbee45056890
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3affc3d743f34d9e1993a79867c331a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c124e2cfc3276bc60b9ed620155442a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L63-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L63-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a722cba877ed396b7eb671d3d28d83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8ca8531d4c5464de1df56baf92eca1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d72802a0a2f1f4056bdf23d394f7047b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a4f0cf2639bcc6cbb26bffdda95dbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6ab9a977c0287a29a30c5dd084197a4 |
| publicationDate |
2010-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010015550-A1 |
| titleOfInvention |
Dual damascene via filling composition |
| abstract |
Compositions for use in dual damascene process are disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009155719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140006794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009035704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022066317-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I799192-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8722840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11656550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015197597-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013230809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022136235-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101682919-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130591-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10227452-B2 |
| priorityDate |
2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |