http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009299655-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_478d17f8f29b09cefed17f96d469cc28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c74c5f4a48dc62fcb650514d407b9b7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8825
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
filingDate 2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e95ed69866f99eaaa866b7843692628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_819fd698438a3ff018959cff54d20252
publicationDate 2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009299655-A1
titleOfInvention Systems and methods for determining two or more characteristics of a wafer
abstract Systems and methods for determining two or more characteristics of a wafer are provided. The two or more characteristics include a characteristic of the wafer that is spatially localized in at least one dimension and a characteristic of the wafer that is not spatially localized in two dimensions.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10324046-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9255891-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110986818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11353390-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012162665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010060888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011529274-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8310665-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8494802-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014139829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11703460-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8654350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10324045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012053854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11262661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019384184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8467978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10072921-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10101676-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234271-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016090349-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013222788-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8269960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017072443-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017053581-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107003114-A
priorityDate 2008-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7417722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006181700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002182760-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6919957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009037134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006062445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008205745-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007156379-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6538730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7067819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003011786-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7373277-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007024998-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7315642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7369233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005179910-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007288219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006192949-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008219545-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5625451-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7359052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003210393-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008013083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4410278-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7286218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5909276-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6917419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004095575-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006192948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007252977-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5608453-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006256326-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006192950-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7349079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7528944-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008018887-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6917433-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7038773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004252879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7751046-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764

Total number of triples: 86.