| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62f941494409aea84f621977c5f0ab81 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24174 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d42e5636a1520eaf9cfa26f33ce89ba7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f62f9df746727f248eb0cab691e3fe8c |
| publicationDate |
2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009236608-A1 |
| titleOfInvention |
Method for Producing Graphitic Patterns on Silicon Carbide |
| abstract |
In a method of making a vertical graphitic path on a silicon carbide crystal having a horizontal surface, a portion of the silicon carbide crystal is removed from the horizontal surface so as to define a vertical surface that is transverse to the horizontal surface of the silicon carbide crystal. The vertical surface is annealed so as to generate a thin-film graphitic layer on the vertical surface. In another method of making graphitic layers, a material that inhibits formation of a graphitic layer when the silicon carbide crystal is annealed is applied to a surface of a silicon carbide crystal so as to define at least one opening that exposes a portion of the surface of the silicon carbide crystal. The portion of the silicon carbide crystal is annealed so as to generate a thin-film graphitic layer in the portion of the silicon carbide crystal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8759153-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012211723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011169013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9171907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8080441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011108806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018101-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012125898-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9536953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476617-B2 |
| priorityDate |
2008-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |