| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f8a75eccad537775d254cecc9998bba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1cee72106f3ab2cb90d2bb4714a5d99a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0c8b61d6b0e00466a3fa200c4809550
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c927a96e22b53e535c2d5dca9d3c00d4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-56 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 |
| filingDate |
2009-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55b9573d8e501898abfb685b9ead75fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48bb2c4b88ff484207b2d928b351d819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2c40169d0d90d3b94a22052121d3dc6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59d1386a4df5978b5b43ed77beb29339 |
| publicationDate |
2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009208670-A1 |
| titleOfInvention |
Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| abstract |
This invention relates to organometallic compounds having the formula (L 1 ) y M(L 2 ) z wherein M is a metal or metalloid, L 1 is the same or different and is (i) a substituted or unsubstituted anionic 4 electron donor ligand or (ii) a substituted or unsubstituted anionic 4 electron donor ligand with a pendant neutral 2 electron donor moiety, L 2 is the same or different and is (i) a substituted or unsubstituted anionic 2 electron donor ligand or (ii) a substituted or unsubstituted neutral 2 electron donor ligand; y is an integer of 2; and z is an integer of from 0 to 2; and wherein the sum of the oxidation number of M and the electric charges of L 1 and L 2 is equal to 0; a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343580-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111607817-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011064879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10323054-B2 |
| priorityDate |
2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |