| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c927a96e22b53e535c2d5dca9d3c00d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f8a75eccad537775d254cecc9998bba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1cee72106f3ab2cb90d2bb4714a5d99a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b25c8edafd654f2061e7d29ef5d12a2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 |
| filingDate |
2009-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e40ff031ba79c7ebcf3d55db109f0c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec2f0e925a2a404bcd641ff7e90ffbbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd0b0d31f48ed9f769bdaed7acf06d7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a7c9329d27c43bf11e75dc237c9b0be |
| publicationDate |
2009-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009203917-A1 |
| titleOfInvention |
Organometallic compounds, processes for the preparation thereof and methods of use thereof |
| abstract |
This invention relates to organometallic compounds having the formula L 1 ML 2 wherein M is a metal or metalloid, L 1 is a substituted or unsubstituted 6 electron donor anionic ligand, and L 2 is a substituted or unsubstituted 6 electron donor anionic ligand, wherein L 1 and L 2 are the same or different, a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions. |
| priorityDate |
2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |