| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B38-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-00 |
| filingDate |
2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_361baa05ca1f01d2c7e1abfca6e5cbef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70403318f49ba1f870f571693a0a58fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c07aaceee388b4f39b0565b235e4dc5b |
| publicationDate |
2009-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009176349-A1 |
| titleOfInvention |
Method and Device for Machining a Wafer, in Addition to a Wafer Comprising a Separation Layer and a Support Layer |
| abstract |
A process and an apparatus are described for the treatment of wafers, in particular for the thinning of wafers. A wafer with a carrier layer and an interlayer arranged between the carrier layer and the wafer is also described, in which the interlayer is a plasmapolymeric layer that adheres to the wafer and adheres more strongly to the carrier layer than to the wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8173522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9493686-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9818636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9909040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2725605-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9644118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013240127-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9315696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8833422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9034139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345837-B2 |
| priorityDate |
2002-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |