| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-10 |
| filingDate |
2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_379f90686cfecb442d9292e9bd2272e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db47a1d6e1a4e4d7a401d984dffeafc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c560ad17b395855aa6a3b1cee8838a7 |
| publicationDate |
2009-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009085170-A1 |
| titleOfInvention |
Interfacial roughness reducing film, wiring layer, semiconductor device, and method of manufacturing semiconductor device |
| abstract |
An interfacial roughness reducing film which is in contact, on one side thereof, with an insulating film and in contact, on a side opposite from the one side, with wiring comprises a Si—O bond, and is formed using a composition containing a silicon compound that comprises at least one bond of Si—N bonds and Si—Cl bonds wherein the number of Si—N bonds and Si—Cl bonds combined per molecule of the compound is at least two. An interfacial roughness between the interfacial roughness reducing film and the wiring is smaller than that between the interfacial roughness reducing film and the insulating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748175-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3766888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3680245-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010301494-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022148965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11267828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637065-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111511752-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010244270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009023378-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009023378-A1 |
| priorityDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |